)]}'
{
  "id": "5fe8316bf626945c79b47f2056fe68d796b818a2",
  "entries": [
    {
      "mode": 16384,
      "type": "tree",
      "id": "9e821702cae403d4cfd8a50d4790fb40371ebc3e",
      "name": "130nm"
    },
    {
      "mode": 16384,
      "type": "tree",
      "id": "13130a127717e448f5382c10b67810a482c3e3ab",
      "name": "22nm"
    },
    {
      "mode": 16384,
      "type": "tree",
      "id": "630e63f5e2d64dce8230ca53d6be874ed017f106",
      "name": "45nm"
    }
  ]
}